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Applications HD



​Process Chamber Consumables

  • Resistant to Etch Chemistry
  • High Purity
  • Lower Cost

Wafer Contact and Transfer Parts

  • High Temperature Resistance
  • Non Melting
  • Lowest Level of Ionic Contaminates 

Thermal and Electrical Components

  • High Heat Deflection Temperature
  • High Dielectric Strength
  • Low Off-gassing Levels 
HD Chemical Resistance.pdf
HD Data Sheet.pdf
HD Trace Metals.pdf